TMP-B70(複合軸承型)
Turbo Molecular Pump
• 長耐久的軸承機理可以減少維護成本
• 可以和一個小型前級泵共同使用
• 可以任意選擇安裝方向
• 可以和一個小型前級泵共同使用
• 可以任意選擇安裝方向
規格說明
Turbo molecular pump model | TMP-B70 | |||
Cooling method | Convection | Forced air by cooling fan | Water cooling | |
Ultimate pressure※2 | After baking | ※1 | 10-8 Pa order※2 | 10-8 Pa order※2 |
Non-baking | 10-6 Pa order | 10-6 Pa order | 10-6 Pa order | |
Pumping speed※3 | N2 | 70 L/s | 70 L/s | 70 L/s |
He | 60 L/s | 60 L/s | 60 L/s | |
H2 | 49 L/s | 49 L/s | 49 L/s | |
Pumping speed(KF40) | N2 | 41 L/s | 41 L/s | 41 L/s |
He | 46 L/s | 46 L/s | 46 L/s | |
H2 | 42 L/s | 42 L/s | 42 L/s | |
Compression ratio | N2 | > 1×109 | > 1×109 | > 1×109 |
He | 4×107 | 4×107 | 4×107 | |
H2 | 4×105 | 4×105 | 4×105 | |
Critical backing pressure(N2 gas 87,000rpm) | 1400Pa | 1400Pa | 1400Pa | |
Maximum allowable continuous backing pressure※4 | N2 | 300 Pa(ambient <25℃) 200 Pa(ambient <30℃) |
900 Pa(ambient <25℃) 600 Pa(ambient <35℃) |
900 Pa(ambient <25℃) 600 Pa(ambient <40℃) |
Maximum allowable gas throughput at continuous pumping | 15 SCCM(ambient 25℃) 10 SCCM(ambient 30℃) |
40 SCCM(ambient 25℃) 30 SCCM(ambient 35℃) |
40 SCCM(ambient 25℃) 30 SCCM(ambient 45℃) |
|
weight | ICF | 5.0 kg | 5.2 kg | 5.1 kg |
VG | 3.3 kg | 3.5 kg | 3.4 kg | |
ISO | 3.0 kg | 3.2 kg | 3.1 kg | |
KF | 3.1 kg | 3.3 kg | 3.2 kg | |
Bearing type | Passive magnetic bearing and ceramic bearing | |||
Inlet flange | ICF114、VG65、ISO63K、KF40 | |||
Outlet port | KF16 | |||
Rated speed | 87,000 rpm | |||
Stat-up time(up to 80 %) | 1.7 minutes | |||
Mounting direction | In any desired direction | |||
Noise [Shimadzu's method]※5 | ≤ 48 dB(A) | |||
Admissible ambient magnetic field | Radial direction | 3 mT | ||
Axial direction | 15 mT | |||
Input electric power | Voltage | DC24 V ± 5 % | ||
Maximum power | 120 W |
· ※1: Only pumps equipped with a ICF flange and cooling fan can be baked.
· ※2: When using a two-stage oil-sealed rotary pump as an auxiliary pump.
· ※3: When no protective net is used. Pumping speed for N2 is 68 L/s when a protective net is used.
· ※4: Maximum allowable backing pressure for continuous running when gas throughput at inlet port is 0 mL/min.
· ※5: Measured for the ISO flange model.