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廣域型 渦輪分子式幫浦【03 Series】
廣域型 渦輪分子式幫浦【03 Series】

廣域型 渦輪分子式幫浦【03 Series】

Wide-Range TURBO MOLECULAR PUMP【03 Series】
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規格說明
TMP-203LM TMP-303LM TMP-403LM TMP-803LM(0) TMP-1003LM

TURBO MOLECULAR PUMP TMP-203LM
Rotor coating None
Applicable power supply EI-R04M
Inlet flange VG100/ICF152/ISO 100B/ISO 100C
Outlet flange KF25
Cooling method Water cooled
Ultimate pressure(after baking)Pa (Torr) (Note2) 10-8 Pa order
Maximum inlet pressure during continuous operation(N2) 200 Pa
Maximum outlet pressure during continuous operation 400 Pa
Pumping speed (Note 4) N2 190 L/s
He 140 L/s
   H2 120 L/s
Compression ratio N2 1×109
                              He 6×104
                              H2 4×103
Rated rotation speed 50000 rpm
Startup time Within 5 minutes
Direction of installation Arbitrary
Baking temperature of pump inlet 120℃ or lower
Vibration, measured by the Shimadzu method Less than 0.01μm(single amplitude)
Recommended purge gas flowrate(Note 3) 20 to 30 mL/min
Recommended pumping speed of backing vacuum pump during gas purging 200 L/min or higher
Operational ambient temperature range Operation：0℃ to 40℃ /Storage： -25℃ to 70℃
Allowable magnetic flux density Radial directions 3 mT
Axial directions 15 mT
Cooling water Flowrate 1 to 3 L/min
Pressure 0.2 to 0.5 Mpa
Temperature 5 to 30 ℃
Weight 9 kg
TURBO MOLECULAR PUMP TMP-303LM
Rotor coating None
Applicable power supply EI-R04M
Inlet flange VG100/ICF152/ISO 100B/ISO 100C
Outlet flange KF25
Cooling method Water cooled
Ultimate pressure(after baking)Pa (Torr) (Note2) 10-8 Pa order
Maximum inlet pressure during continuous operation(N2) 200Pa
Maximum outlet pressure during continuous operation 400 Pa
Pumping speed (Note 4) N2 320 L/s
He 340 L/s
   H2 320 L/s
Compression ratio N2 1×109
He 8×104
 H2 1×104
Rated rotation speed 45000 rpm
Startup time Within 5 minutes
Direction of installation Arbitrary
Baking temperature of pump inlet 120℃ or lower
Vibration, measured by the Shimadzu method Less than 0.012μm(single amplitude)
Recommended purge gas flowrate(Note 3) 20 to 30 mL/min
Recommended pumping speed of backing vacuum pump during gas purging 200 L/min or higher
Operational ambient temperature range Operation：0℃ to 40℃ /Storage： -25℃ to 70℃
Allowable magnetic flux density Radial directions 3 mT
Axial directions 15 mT
Cooling water Flowrate 1 to 3 L/min
Pressure 0.2 to 0.5 Mpa
Temperature 5 to 30 ℃
Weight 14 kg
 
TURBO MOLECULAR PUMP TMP-403LM
Rotor coating None
Applicable power supply EI-R04M
Inlet flange VG150/ICF203/ISO 160B/ISO 160C
Outlet flange KF25
Cooling method Water cooled
Ultimate pressure(after baking)Pa (Torr) (Note2) 10-8 Pa order
Maximum inlet pressure during continuous operation(N2) 200 Pa
Maximum outlet pressure during continuous operation 400 Pa
Pumping speed (Note 4) N2 420 L/s
He 360 L/s
   H2 340 L/s
Compression ratio N2 1×109
He 8×104
 H2 1×104
Rated rotation speed 45000 rpm
Startup time Within 5 minutes
Direction of installation Arbitrary
Baking temperature of pump inlet 120℃ or lower
Vibration, measured by the Shimadzu method Less than 0.012μm(single amplitude)
Recommended purge gas flowrate(Note 3) 20 to 30 mL/min
Recommended pumping speed of backing vacuum pump during gas purging 200 L/min or higher
Operational ambient temperature range Operation：0℃ to 40℃ /Storage： -25℃ to 70℃
Allowable magnetic flux density Radial directions 3 mT
Axial directions 15 mT
Cooling water Flowrate 1 to 3 L/min
Pressure 0.2 to 0.5 Mpa
Temperature 5 to 30 ℃
Weight 14 kg
 
TURBO MOLECULAR PUMP TMP-803LM(0)
Rotor coating None
Applicable power supply EI-R04M
Inlet flange VG150/ICF203/ISO 160B
Outlet flange KF40
Cooling method Water cooled
Ultimate pressure(after baking)Pa (Torr) (Note2) 10-9 Pa order
Maximum inlet pressure during continuous operation(N2) 400 Pa
Maximum outlet pressure during continuous operation 655 Pa
Pumping speed (Note 4) N2 800 L/s
He 800 L/s
   H2 700 L/s
Compression ratio N2 1×109 min
He 8×104
 H2 4×103
Rated rotation speed 35000 rpm
Startup time Within 5 minutes
Direction of installation Arbitrary
Baking temperature of pump inlet 120℃ or lower
Vibration, measured by the Shimadzu method Less than 0.01μm(single amplitude)
Recommended purge gas flowrate(Note 3) 20 to 30 mL/min
Recommended pumping speed of backing vacuum pump during gas purging 500 L/min or higher
Operational ambient temperature range Operation：0℃ to 40℃ /Storage： -25℃ to 70℃
Allowable magnetic flux density Radial directions 3 mT
Axial directions 15 mT
Cooling water Flowrate 1 to 3 L/min
Pressure 0.2 to 0.5 Mpa
Temperature 5 to 30 ℃
Weight 33 kg
 
TURBO MOLECULAR PUMP TMP-1003LM
Rotor coating None
Applicable power supply EI-R04M
Inlet flange VG200/ICF253/ISO 200B
Outlet flange KF40
Cooling method Water cooled
Ultimate pressure(after baking)Pa (Torr) (Note2) 10-9 Pa order
Maximum inlet pressure during continuous operation(N2) 400 Pa
Maximum outlet pressure during continuous operation 655 Pa
Pumping speed (Note 4) N2 1080 L/s
He 930 L/s
   H2 790 L/s
Compression ratio N2 1×109 min
He 8×104
 H2 4×103
Rated rotation speed 35000 rpm
Startup time Within 5 minutes
Direction of installation Arbitrary
Baking temperature of pump inlet 120℃ or lower
Vibration, measured by the Shimadzu method Less than 0.01μm(single amplitude)
Recommended purge gas flowrate(Note 3) 20 to 30 mL/min
Recommended pumping speed of backing vacuum pump during gas purging 500 L/min or higher
Operational ambient temperature range Operation：0℃ to 40℃ /Storage： -25℃ to 70℃
Allowable magnetic flux density Radial directions 3 mT
Axial directions 15 mT
Cooling water Flowrate 1 to 3 L/min
Pressure 0.2 to 0.5 Mpa
Temperature 5 to 30 ℃
Weight 32 kg max
 
(Note1) When a metal gasket is used at the inlet flange. If an O-ring gasket is used, the ultimate pressure will be order of 10-7 pa.
(Note2) When no protective net is used. If a protective net is used, the exhuast speed(N2) will be as follows：TMP-203：180 L/s TMP-303：300 L/s ；TMP-403：400 L/s；TMP-803(0)：730 L/s；TMP-1003：970 L/s.
(Note3) mL/min shows the volumetric flowrate at 0℃ and 1 atmosphere.(Equivalent to SCCM.)
 



TMP-203LM TMP-303LM TMP-403LM TMP-803LM(0) TMP-1003LM

TURBO MOLECULAR PUMP TMP-203LM
Rotor coating None
Applicable power supply EI-R04M
Inlet flange VG100/ICF152/ISO 100B/ISO 100C
Outlet flange KF25
Cooling method Water cooled
Ultimate pressure(after baking)Pa (Torr) (Note2) 10-8 Pa order
Maximum inlet pressure during continuous operation(N2) 200 Pa
Maximum outlet pressure during continuous operation 400 Pa
Pumping speed (Note 4) N2 190 L/s
He 140 L/s
H2 120 L/s
Compression ratio N2 1×109
He 6×104
H2 4×103
Rated rotation speed 50000 rpm
Startup time Within 5 minutes
Direction of installation Arbitrary
Baking temperature of pump inlet 120℃ or lower
Vibration, measured by the Shimadzu method Less than 0.01μm(single amplitude)
Recommended purge gas flowrate(Note 3) 20 to 30 mL/min
Recommended pumping speed of backing vacuum pump during gas purging 200 L/min or higher
Operational ambient temperature range Operation：0℃ to 40℃ /Storage： -25℃ to 70℃
Allowable magnetic flux density Radial directions 3 mT
Axial directions 15 mT
Cooling water Flowrate 1 to 3 L/min
Pressure 0.2 to 0.5 Mpa
Temperature 5 to 30 ℃
Weight 9 kg
型號 TMP-203LM
轉子塗層 None
適用電源 EI-R04M
進氣法蘭 VG100/ICF152/ISO 100B/ISO 100C
出口法蘭 KF25
冷卻方式 水冷
極限壓力(after baking)Pa (Torr) (Note2) 10-8 Pa order
連續運行時的最大入口壓力(N2) 200 Pa
連續運行時的最大出口壓力 400 Pa
抽速(Note 4) N2 190 L/s
He 140 L/s
H2 120 L/s
壓縮率 N2 1×109
He 6×104
H2 4×103
額定轉速 50000 rpm
啟動時間 5 分鐘
安裝方向 任意方向
泵入口溫度 120℃以下
震動, measured by the Shimadzu method 小於0.01μm（單振幅）
建議吹掃氣體流量(Note 3) 20 至 30 mL/min
抽氣期間輔助真空泵的建議抽速 200 L / min以上
工作環境溫度範圍 工作溫度：0℃至40℃/儲存溫度：-25℃至70℃
容許磁通密度 徑向 3 mT
軸向 15 mT
冷卻水 流量 1 to 3 L/min
壓力 0.2 to 0.5 Mpa
溫度 5 to 30 ℃
重量 9 kg
TURBO MOLECULAR PUMP TMP-303LM
Rotor coating None
Applicable power supply EI-R04M
Inlet flange VG100/ICF152/ISO 100B/ISO 100C
Outlet flange KF25
Cooling method Water cooled
Ultimate pressure(after baking)Pa (Torr) (Note2) 10-8 Pa order
Maximum inlet pressure during continuous operation(N2) 200Pa
Maximum outlet pressure during continuous operation 400 Pa
Pumping speed (Note 4) N2 320 L/s
He 340 L/s
H2 320 L/s
Compression ratio N2 1×109
He 8×104
H2 1×104
Rated rotation speed 45000 rpm
Startup time Within 5 minutes
Direction of installation Arbitrary
Baking temperature of pump inlet 120℃ or lower
Vibration, measured by the Shimadzu method Less than 0.012μm(single amplitude)
Recommended purge gas flowrate(Note 3) 20 to 30 mL/min
Recommended pumping speed of backing vacuum pump during gas purging 200 L/min or higher
Operational ambient temperature range Operation：0℃ to 40℃ /Storage： -25℃ to 70℃
Allowable magnetic flux density Radial directions 3 mT
Axial directions 15 mT
Cooling water Flowrate 1 to 3 L/min
Pressure 0.2 to 0.5 Mpa
Temperature 5 to 30 ℃
Weight 14 kg
型號 TMP-303LM
轉子塗層 None
適用電源 EI-R04M
進氣法蘭 VG100/ICF152/ISO 100B/ISO 100C
出口法蘭 KF25
冷卻方式 水冷
極限壓力(after baking)Pa (Torr) (Note2) 10-8 Pa order
連續運行時的最大入口壓力(N2) 200Pa
連續運行時的最大出口壓力 400 Pa
抽速 (Note 4) N2 320 L/s
He 340 L/s
H2 320 L/s
壓縮率 N2 1×109
He 8×104
H2 1×104
額定轉速 45000 rpm
啟動時間 5 分鐘
安裝方向 任意方向
泵入口溫度 120℃以下
震動, measured by the Shimadzu method 小於0.012μm（單振幅）
建議吹掃氣體流量(Note 3) 20 至30 mL/min
抽氣期間輔助真空泵的建議抽速 200 L / min以上
工作環境溫度範圍 工作溫度：0℃至40℃/儲存溫度：-25℃至70℃
容許磁通密度 徑向 3 mT
軸向 15 mT
冷卻水 流量 1 to 3 L/min
壓力 0.2 to 0.5 Mpa
溫度 5 to 30 ℃
重量 14 kg
TURBO MOLECULAR PUMP TMP-403LM
Rotor coating None
Applicable power supply EI-R04M
Inlet flange VG150/ICF203/ISO 160B/ISO 160C
Outlet flange KF25
Cooling method Water cooled
Ultimate pressure(after baking)Pa (Torr) (Note2) 10-8 Pa order
Maximum inlet pressure during continuous operation(N2) 200 Pa
Maximum outlet pressure during continuous operation 400 Pa
Pumping speed (Note 4) N2 420 L/s
He 360 L/s
H2 340 L/s
Compression ratio N2 1×109
He 8×104
H2 1×104
Rated rotation speed 45000 rpm
Startup time Within 5 minutes
Direction of installation Arbitrary
Baking temperature of pump inlet 120℃ or lower
Vibration, measured by the Shimadzu method Less than 0.012μm(single amplitude)
Recommended purge gas flowrate(Note 3) 20 to 30 mL/min
Recommended pumping speed of backing vacuum pump during gas purging 200 L/min or higher
Operational ambient temperature range Operation：0℃ to 40℃ /Storage： -25℃ to 70℃
Allowable magnetic flux density Radial directions 3 mT
Axial directions 15 mT
Cooling water Flowrate 1 to 3 L/min
Pressure 0.2 to 0.5 Mpa
Temperature 5 to 30 ℃
Weight 14 kg
型號 TMP-403LM
轉子塗層 None
適用電源 EI-R04M
進氣法蘭 VG150/ICF203/ISO 160B/ISO 160C
出口法蘭 KF25
冷卻方式 水冷
極限壓力(after baking)Pa (Torr) (Note2) 10-8 Pa order
連續運行時的最大入口壓力(N2) 200 Pa
連續運行時的最大出口壓力 400 Pa
抽速 (Note 4) N2 420 L/s
He 360 L/s
H2 340 L/s
壓縮率 N2 1×109
He 8×104
H2 1×104
定額轉速 45000 rpm
啟動時間 5 分鐘
安裝方向 任意方向
泵入口溫度 120℃以下
震動, measured by the Shimadzu method 小於0.012μm（單振幅）
建議吹掃氣體流量(Note 3) 20 至 30 mL/min
20 至 30 mL/min
抽氣期間輔助真空泵的建議抽速		 200 L/min 以上
工作環境溫度範圍 工作溫度：0℃至40℃/儲存溫度：-25℃至70℃
容許磁通密度 徑向 3 mT
軸向 15 mT
冷卻水 壓力 1 to 3 L/min
流量 0.2 to 0.5 Mpa
溫度 5 to 30 ℃
重量 14 kg
TURBO MOLECULAR PUMP TMP-803LM(0)
Rotor coating None
Applicable power supply EI-R04M
Inlet flange VG150/ICF203/ISO 160B
Outlet flange KF40
Cooling method Water cooled
Ultimate pressure(after baking)Pa (Torr) (Note2) 10-9 Pa order
Maximum inlet pressure during continuous operation(N2) 400 Pa
Maximum outlet pressure during continuous operation 655 Pa
Pumping speed (Note 4) N2 800 L/s
He 800 L/s
H2 700 L/s
Compression ratio N2 1×109 min
He 8×104
H2 4×103
Rated rotation speed 35000 rpm
Startup time Within 5 minutes
Direction of installation Arbitrary
Baking temperature of pump inlet 120℃ or lower
Vibration, measured by the Shimadzu method Less than 0.01μm(single amplitude)
Recommended purge gas flowrate(Note 3) 20 to 30 mL/min
Recommended pumping speed of backing vacuum pump during gas purging 500 L/min or higher
Operational ambient temperature range Operation：0℃ to 40℃ /Storage： -25℃ to 70℃
Allowable magnetic flux density Radial directions 3 mT
Axial directions 15 mT
Cooling water Flowrate 1 to 3 L/min
Pressure 0.2 to 0.5 Mpa
Temperature 5 to 30 ℃
Weight 33 kg
型號 TMP-803LM(0)
轉子塗層 None
適用電源 EI-R04M
進氣法蘭 VG150/ICF203/ISO 160B
出口法蘭 KF40
冷卻方式 水冷
極限壓力(after baking)Pa (Torr) (Note2) 10-9 Pa order
連續運行時的最大入口壓力(N2) 400 Pa
連續運行時的最大出口壓力 655 Pa
抽速 (Note 4) N2 800 L/s
He 800 L/s
H2 700 L/s
壓縮率 N2 1×109 min
He 8×104
H2 4×103
額定轉速 35000 rpm
啟動時間 5 分鐘
安裝方向 任意方向
泵入口溫度 120℃以下
震動, measured by the Shimadzu method 小於0.012μm（單振幅）
建議吹掃氣體流量(Note 3) 20 to 30 mL/min
抽氣期間輔助真空泵的建議抽速 500 L/min 以上
工作環境溫度範圍 工作溫度：0℃至40℃/儲存溫度：-25℃至70℃
容許磁通密度 徑向 3 mT
軸向 15 mT
冷卻水 流量 1 to 3 L/min
壓力 0.2 to 0.5 Mpa
溫度 5 to 30 ℃
重量 33 kg
TURBO MOLECULAR PUMP TMP-1003LM
Rotor coating None
Applicable power supply EI-R04M
Inlet flange VG200/ICF253/ISO 200B
Outlet flange KF40
Cooling method Water cooled
Ultimate pressure(after baking)Pa (Torr) (Note2) 10-9 Pa order
Maximum inlet pressure during continuous operation(N2) 400 Pa
Maximum outlet pressure during continuous operation 655 Pa
Pumping speed (Note 4) N2 1080 L/s
He 930 L/s
H2 790 L/s
Compression ratio N2 1×109 min
He 8×104
H2 4×103
Rated rotation speed 35000 rpm
Startup time Within 5 minutes
Direction of installation Arbitrary
Baking temperature of pump inlet 120℃ or lower
Vibration, measured by the Shimadzu method Less than 0.01μm(single amplitude)
Recommended purge gas flowrate(Note 3) 20 to 30 mL/min
Recommended pumping speed of backing vacuum pump during gas purging 500 L/min or higher
Operational ambient temperature range Operation：0℃ to 40℃ /Storage： -25℃ to 70℃
Allowable magnetic flux density Radial directions 3 mT
Axial directions 15 mT
Cooling water Flowrate 1 to 3 L/min
Pressure 0.2 to 0.5 Mpa
Temperature 5 to 30 ℃
Weight 32 kg max
型號 TMP-1003LM
轉子塗層 None
適用電源 EI-R04M
進氣法蘭 VG200/ICF253/ISO 200B
出口法蘭 KF40
冷卻方式 水冷
極限壓力(after baking)Pa (Torr) (Note2) 10-9 Pa order
連續運行時的最大入口壓力(N2) 400 Pa
連續運行時的最大出口壓力 655 Pa
抽速 (Note 4) N2 1080 L/s
He 930 L/s
H2 790 L/s
壓縮率 N2 1×109 min
He 8×104
H2 4×103
額定轉速 35000 rpm
啟動時間 5 分鐘
安裝方向 任意方向
泵入口溫度 120℃ 以下
震動, measured by the Shimadzu method 小於 0.01μm(單震幅)
建議吹掃氣體流量(Note 3) 20 至 30 mL/min
抽氣期間輔助真空泵的建議抽速 500 L/min 以上
工作環境溫度範圍 工作溫度：0℃至40℃/儲存溫度：-25℃至70℃
容許磁通密度 徑向 3 mT
軸向 15 mT
冷卻水 流量 1 to 3 L/min
壓力 0.2 to 0.5 Mpa
溫度 5 to 30 ℃
重量 32 kg max
(Note1) 在入口法蘭處使用金屬墊片時。 如果使用O形圈墊圈，則極限壓力為10-7 pa。
(Note2) 不使用防護網時。 如果使用防護網，則排放速度（N2）為：TMP-203：180 L / s TMP-303：300 L / s； TMP-403：400 L / s； TMP-803（0） ：730 L / s； TMP-1003：970 L / s。
(Note3) mL / min表示在0℃和1個大氣壓下的體積流量。（等效於SCCM。）
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