TMP-B300(複合軸承型)

Turbo Molecular Pump

產品說明

• 長耐久的軸承機理可以減少維護成本
• 可以和一個小型前級泵共同使用
• 可以任意選擇安裝方向

Turbo molecular pump model		TMP-B300
Cooling method		Convection	Forced air by cooling fan
Ultimate pressure^{(note 2)}	After baking	−^{(note 1)}	10^-8 Pa order ^{(note 2)}
Ultimate pressure^{(note 2)}	Non-baking	10^-6 Pa order	10^-6 Pa order
Pumping speed^{(note 3)}	N₂	280 L/s	280 L/s
	He	270 L/s	270 L/s
	H₂	220 L/s	220 L/s
Compression ratio	N₂	> 1 x 10⁹	> 1 x 10⁹
	He	7×10⁶	7×10⁶
	H₂	1×10⁵	1×10⁵
Critical backing pressure		1500 Pa	1500 Pa
Maximum allowable continuous backing pressure^{(note 4)}	N₂	100 Pa (ambient < 35°C)	1000 Pa (ambient 25°C) 930 Pa (ambient 35°C)
Maximum allowable gas throughput at continuous pumping		10 SCCM (ambient 25°C) 4 SCCM (ambient 35°C)	100 SCCM (ambient 25°C) 40 SCCM (ambient 35°C)
weight	VG, ISO	6 kg	6.3 kg
weight	ICF	9 kg	9.3 kg
Bearing type		Passive magnetic bearing and ceramic bearing
Inlet flange		VG100, DN100CF, ISO100K
Outlet port		KF16
Rated speed		60000 rpm
Stat-up time（up to 80 %）		3.5 minutes
Mounting direction		In any desired direction
Noise [Shimadzu's method]^{(note 5)}		≤ 50 dBA
Admissible ambient magnetic field	Radial direction	3 mT
Admissible ambient magnetic field	Axial direction	15 mT
Input electric power	Voltage	DC24 V ± 5 %
Input electric power	Maximum power	180 W

(Note 1)	Only pumps equipped with a CF flange and cooling fan can be baked.
(Note 2)	When using a two-stage oil-sealed rotary pump as an auxiliary pump.
(Note 3)	When no protective net is used. Pumping speed for N₂ is 260 L/s when a protective net is used.
(Note 4)	Maximum allowable backing pressure for continuous running when gas throughput at inlet port is 0 mL/min
(Note 5)	Measured for the ISO flange model.

(Note 1)	僅限泵配備CF法蘭和冷卻風扇。
(Note 2)	當使用兩級油封旋轉泵作為輔助泵時。
(Note 3)	不使用防護網時。使用防護網時，N2的抽速為260 L / s。
(Note 4)	當進氣口的氣體通過量為0 mL / min時，連續運行的最大允許背壓。
(Note 5)	以ISO法蘭機型測得。