TMP-B300(複合軸承型)

Turbo Molecular Pump

• 長耐久的軸承機理可以減少維護成本
• 可以和一個小型前級泵共同使用
• 可以任意選擇安裝方向
規格說明
Turbo molecular pump modelTMP-B300
Cooling methodConvectionForced air by cooling fan
Ultimate pressure(note 2)After baking(note 1)10-8 Pa order (note 2)
Non-baking10-6 Pa order10-6 Pa order
Pumping speed(note 3)N2280 L/s280 L/s
He270 L/s270 L/s
H2220 L/s220 L/s
Compression ratioN2 > 1 x 109> 1 x 109
He7×1067×106
H2 1×1051×105
Critical backing pressure1500 Pa1500 Pa
Maximum allowable continuous
backing pressure(note 4)
N2 100 Pa
(ambient < 35°C)
1000 Pa
(ambient 25°C)
930 Pa
(ambient 35°C)
Maximum allowable gas throughput at
continuous pumping
10 SCCM
(ambient 25°C)
4 SCCM
(ambient 35°C)
100 SCCM
(ambient 25°C)
40 SCCM
(ambient 35°C)
weightVG, ISO6 kg6.3 kg
ICF9 kg9.3 kg
Bearing typePassive magnetic bearing and ceramic bearing
Inlet flangeVG100, DN100CF, ISO100K
Outlet portKF16
Rated speed60000 rpm
Stat-up time(up to 80 %)3.5 minutes
Mounting directionIn any desired direction
Noise [Shimadzu's method](note 5)≤ 50 dBA
Admissible ambient magnetic fieldRadial direction3 mT
Axial direction15 mT
Input electric powerVoltageDC24 V ± 5 %
Maximum power180 W
(Note 1)Only pumps equipped with a CF flange and cooling fan can be baked.
(Note 2)When using a two-stage oil-sealed rotary pump as an auxiliary pump.
(Note 3)When no protective net is used. Pumping speed for N2 is 260 L/s when a protective net is used.
(Note 4)Maximum allowable backing pressure for continuous running when gas throughput at inlet port is 0 mL/min
(Note 5)Measured for the ISO flange model.
型號 TMP-B300
冷卻方式 對流 冷卻風扇通風
極限壓力(note 2) After baking (note 1) 10-8 Pa order (note 2)
Non-baking 10-6 Pa order 10-6 Pa order
抽速(note 3) N2 280 L/s 280 L/s
He 270 L/s 270 L/s
H2 220 L/s 220 L/s
壓縮率 N2 > 1 x 109 > 1 x 109
He 7×106 7×106
H2 1×105 1×105
臨界支撐壓力 1500 Pa 1500 Pa
最大允許連續背壓(note 4) N2 100 Pa
(ambient < 35°C)
1000 Pa
(ambient 25°C)
930 Pa
(ambient 35°C)
連續抽氣時的最大允許氣體通過量 10 SCCM
(ambient 25°C)
4 SCCM
(ambient 35°C)
100 SCCM
(ambient 25°C)
40 SCCM
(ambient 35°C)
重量 VG, ISO 6 kg 6.3 kg
ICF 9 kg 9.3 kg
軸承類型 被動磁軸承和陶瓷軸承
進氣法蘭 VG100, DN100CF, ISO100K
出口 KF16
額定轉速 60000 rpm
啟動時間(up to 80 %) 3.5 分鐘
安裝方向 任何方向
噪聲 [Shimadzu's method](note 5) ≤ 50 dBA

允許的環境磁場
徑向 3 mT
軸向 15 mT
輸入電功率 電壓 DC24 V ± 5 %
最大功率 180 W
(Note 1) 僅限泵配備CF法蘭和冷卻風扇。
(Note 2) 當使用兩級油封旋轉泵作為輔助泵時。
(Note 3) 不使用防護網時。 使用防護網時,N2的抽速為260 L / s。
(Note 4) 當進氣口的氣體通過量為0 mL / min時,連續運行的最大允許背壓。
(Note 5) 以ISO法蘭機型測得。