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大流量型 渦輪分子式幫浦【03 Series】
大流量型 渦輪分子式幫浦【03 Series】

大流量型 渦輪分子式幫浦【03 Series】

HIGH PUMPING THROUGHPUT TMP TURBO MOLECULAR PUMP【03 SERIES】
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規格說明
TMP-1303LM(0) TMP-1503LM(0) TMP-2203LM(0)

TURBO MOLECULAR PUMP TMP-1303LM(0)
Rotor coating None
Applicable power supply EI-R04M
Inlet flange VG200/ICF253/ISO 200B
Outlet flange KF40
Cooling method Water cooled
Ultimate pressure(after baking)Pa (Torr) (Note2) 10-8 Pa order
Maxium flowrate of Ar gas (Note3) 500 mL/min
Maximum inlet pressure during continuous operation(N2) 133 Pa
Maximum outlet pressure during continuous operation 270 Pa
Pumping speed (Note 4) N2 1300 L/s
He 1050 L/s
   H2 750 L/s
Compression ratio N2 6×108
                              He 1×104
                              H2 1×103
Rated rotation speed 30300 rpm
Startup time Within 7 minutes
Direction of installation Arbitrary
Baking temperature of pump inlet 120℃ or lower
Vibration, measured by the Shimadzu method Less than 0.01μm(single amplitude)
Recommended purge gas flowrate(Note 3) 20 to 30 mL/min
Recommended pumping speed of backing vacuum pump during gas purging 600 L/min or higher
Operational ambient temperature range Operation：0℃ to 40℃ /Storage： -25℃ to 70℃
Allowable magnetic flux density Radial directions 3 mT
Axial directions 15 mT
Cooling water Flowrate 2 to 4 L/min
Pressure 0.2 to 0.5 Mpa
Temperature 5 to 25 ℃
Weight 39 kg
 
TURBO MOLECULAR PUMP TMP-1503LM(0)
Rotor coating None
Applicable power supply EI-R04M
Inlet flange VG250/ICF305/ISO 250B
Outlet flange KF40
Cooling method Water cooled
Ultimate pressure(after baking)Pa (Torr) (Note2) 10-8 Pa order
Maxium flowrate of Ar gas (Note3) 500 mL/min
Maximum inlet pressure during continuous operation(N2) 133 Pa
Maximum outlet pressure during continuous operation 270 Pa
Pumping speed (Note 4) N2 1500 L/s
He 1200 L/s
   H2 800 L/s
Compression ratio N2 6×108
He 1×104
 H2 1×103
Rated rotation speed 30300 rpm
Startup time Within 7 minutes
Direction of installation Arbitrary
Baking temperature of pump inlet 120℃ or lower
Vibration, measured by the Shimadzu method Less than 0.01μm(single amplitude)
Recommended purge gas flowrate(Note 3) 20 to 30 mL/min
Recommended pumping speed of backing vacuum pump during gas purging 600 L/min or higher
Operational ambient temperature range Operation：0℃ to 40℃ /Storage： -25℃ to 70℃
Allowable magnetic flux density Radial directions 3 mT
Axial directions 15 mT
Cooling water Flowrate 2 to 4 L/min
Pressure 0.2 to 0.5 Mpa
Temperature 5 to 25 ℃
Weight 42 kg
 
TURBO MOLECULAR PUMP TMP-2203LM(0)
Rotor coating None
Applicable power supply EI-R04M
Inlet flange VG250/ICF305/ISO 250B
Outlet flange KF40
Cooling method Water cooled
Ultimate pressure(after baking)Pa (Torr) (Note2) 10-8 Pa order
Maxium flowrate of Ar gas (Note3) 1300 mL/min
Maximum inlet pressure during continuous operation(N2) 40 Pa
Maximum outlet pressure during continuous operation 270 Pa
Pumping speed (Note 4) N2 21400 L/s
He 2000 L/s
   H2 1350 L/s
Compression ratio N2 1.4×108 min
He 1×104 min
 H2 1×103 min
Rated rotation speed 24600 rpm
Startup time Within 11 minutes
Direction of installation Arbitrary
Baking temperature of pump inlet 120℃ or lower
Vibration, measured by the Shimadzu method Less than 0.01μm(single amplitude)
Recommended purge gas flowrate(Note 3) 20 to 30 mL/min
Recommended pumping speed of backing vacuum pump during gas purging 800 L/min or higher
Operational ambient temperature range Operation：0℃ to 40℃ /Storage： -25℃ to 70℃
Allowable magnetic flux density Radial directions 3 mT
Axial directions 15 mT
Cooling water Flowrate 2 to 4 L/min
Pressure 0.2 to 0.5 Mpa
Temperature 5 to 25 ℃
Weight 59 kg
 
(Note1) When a metal gasket is used at the inlet flange. If an O-ring gasket is used, the ultimate pressure will be order of 10-7 pa.
(Note2) mL/min shows the volumetric flowrate at 0℃ and 1 atmosphere.(Equivalent to SCCM.)
(Note3) When no protective net is used. If a protective net is used, the exhuast speed(N2) will be as follows：TMP-1303(0)：1130 L/s TMP-1503：1380 L/s ；TMP-2203(0)：2050 L/s
 



TMP-1303LM(0) TMP-1503LM(0) TMP-2203LM(0)

TURBO MOLECULAR PUMP TMP-1303LM(0)
Rotor coating None
Applicable power supply EI-R04M
Inlet flange VG200/ICF253/ISO 200B
Outlet flange KF40
Cooling method Water cooled
Ultimate pressure(after baking)Pa (Torr) (Note2) 10-8 Pa order
Maxium flowrate of Ar gas (Note3) 500 mL/min
Maximum inlet pressure during continuous operation(N2) 133 Pa
Maximum outlet pressure during continuous operation 270 Pa
Pumping speed (Note 4) N2 1300 L/s
He 1050 L/s
H2 750 L/s
Compression ratio N2 6×108
He 1×104
H2 1×103
Rated rotation speed 30300 rpm
Startup time Within 7 minutes
Direction of installation Arbitrary
Baking temperature of pump inlet 120℃ or lower
Vibration, measured by the Shimadzu method Less than 0.01μm(single amplitude)
Recommended purge gas flowrate(Note 3) 20 to 30 mL/min
Recommended pumping speed of backing vacuum pump during gas purging 600 L/min or higher
Operational ambient temperature range Operation：0℃ to 40℃ /Storage： -25℃ to 70℃
Allowable magnetic flux density Radial directions 3 mT
Axial directions 15 mT
Cooling water Flowrate 2 to 4 L/min
Pressure 0.2 to 0.5 Mpa
Temperature 5 to 25 ℃
Weight 39 kg
型號 TMP-1303LM(0)
轉子塗層 None
適用電源 EI-R04M
進氣法蘭 VG200/ICF253/ISO 200B
出口法蘭 KF40
冷卻方式 水冷
極限壓力(after baking)Pa (Torr) (Note2) 10-8 Pa order
氬氣最大流量 (Note3) 500 mL/min
連續運行時的最大入口壓力(N2) 133 Pa
連續運行時的最大出口壓力 270 Pa
抽速(Note 4) N2 1300 L/s
He 1050 L/s
H2 750 L/s
壓縮率 N2 6×108
He 1×104
H2 1×103
額定轉速 30300 rpm
啟動時間 7 分鐘
安裝方向 任意方向
泵入口的溫度 120℃以下
震動, measured by the Shimadzu method 小於0.01μm（單振幅）
推薦吹掃氣流量(Note 3) 20 至 30 mL/min
抽氣期間輔助真空泵的建議抽速 600 L / min以上
工作環境溫度範圍 工作溫度：0℃至40℃/儲存溫度：-25℃至70℃
容許磁通密度 徑向 3 mT
軸向 15 mT
冷卻水 流量 2 to 4 L/min
壓力 0.2 to 0.5 Mpa
溫度 5 to 25 ℃
重量 39 kg
TURBO MOLECULAR PUMP TMP-1503LM(0)
Rotor coating None
Applicable power supply EI-R04M
Inlet flange VG250/ICF305/ISO 250B
Outlet flange KF40
Cooling method Water cooled
Ultimate pressure(after baking)Pa (Torr) (Note2) 10-8 Pa order
Maxium flowrate of Ar gas (Note3) 500 mL/min
Maximum inlet pressure during continuous operation(N2) 133 Pa
Maximum outlet pressure during continuous operation 270 Pa
Pumping speed (Note 4) N2 1500 L/s
He 1200 L/s
H2 800 L/s
Compression ratio N2 6×108
He 1×104
H2 1×103
Rated rotation speed 30300 rpm
Startup time Within 7 minutes
Direction of installation Arbitrary
Baking temperature of pump inlet 120℃ or lower
Vibration, measured by the Shimadzu method Less than 0.01μm(single amplitude)
Recommended purge gas flowrate(Note 3) 20 to 30 mL/min
Recommended pumping speed of backing vacuum pump during gas purging 600 L/min or higher
Operational ambient temperature range Operation：0℃ to 40℃ /Storage： -25℃ to 70℃
Allowable magnetic flux density Radial directions 3 mT
Axial directions 15 mT
Cooling water Flowrate 2 to 4 L/min
Pressure 0.2 to 0.5 Mpa
Temperature 5 to 25 ℃
Weight 42 kg
型號 TMP-1503LM(0)
轉子塗層 None
適用電源 EI-R04M
進氣法蘭 VG250/ICF305/ISO 250B
出口法蘭 KF40
冷卻方式 Water cooled
極限壓力(after baking)Pa (Torr) (Note2) 10-8 Pa order
氬氣最大流量(Note3) 500 mL/min
連續運行時的最大入口壓力(N2) 133 Pa
連續運行時的最大出口壓力 270 Pa
抽速 (Note 4) N2 1500 L/s
He 1200 L/s
H2 800 L/s
壓縮率 N2 6×108
He 1×104
H2 1×103
定額轉速 30300 rpm
啟動時間 7 分鐘
安裝方向 任意方向
泵入口的溫度 120℃ 以下
震動, measured by the Shimadzu method 小於0.01μm（單振幅）
推薦吹掃氣流量(Note 3) 20 至 30 mL/min
抽氣期間輔助真空泵的建議抽速 600 L/min 以上
工作環境溫度範圍 工作溫度：0℃至40℃/儲存溫度：-25℃至70℃
容許磁通密度 徑向 3 mT
軸向 15 mT
冷卻水 流量 2 to 4 L/min
壓力 0.2 to 0.5 Mpa
溫度 5 to 25 ℃
重量 42 kg
TURBO MOLECULAR PUMP TMP-2203LM(0)
Rotor coating None
Applicable power supply EI-R04M
Inlet flange VG250/ICF305/ISO 250B
Outlet flange KF40
Cooling method Water cooled
Ultimate pressure(after baking)Pa (Torr) (Note2) 10-8 Pa order
Maxium flowrate of Ar gas (Note3) 1300 mL/min
Maximum inlet pressure during continuous operation(N2) 40 Pa
Maximum outlet pressure during continuous operation 270 Pa
Pumping speed (Note 4) N2 21400 L/s
He 2000 L/s
H2 1350 L/s
Compression ratio N2 1.4×108 min
He 1×104 min
H2 1×103 min
Rated rotation speed 24600 rpm
Startup time Within 11 minutes
Direction of installation Arbitrary
Baking temperature of pump inlet 120℃ or lower
Vibration, measured by the Shimadzu method Less than 0.01μm(single amplitude)
Recommended purge gas flowrate(Note 3) 20 to 30 mL/min
Recommended pumping speed of backing vacuum pump during gas purging 800 L/min or higher
Operational ambient temperature range Operation：0℃ to 40℃ /Storage： -25℃ to 70℃
Allowable magnetic flux density Radial directions 3 mT
Axial directions 15 mT
Cooling water Flowrate 2 to 4 L/min
Pressure 0.2 to 0.5 Mpa
Temperature 5 to 25 ℃
Weight 59 kg
型號 TMP-2203LM(0)
轉子塗層 None
適用電源 EI-R04M
進氣法蘭 VG250/ICF305/ISO 250B
出口法蘭 KF40
冷卻方式 水冷
極限壓力(after baking)Pa (Torr) (Note2) 10-8 Pa order
氬氣最大流量(Note3) 1300 mL/min
連續運行時的最大入口壓力(N2) 40 Pa
連續運行時的最出入口壓力 270 Pa
抽速 (Note 4) N2 21400 L/s
He 2000 L/s
H2 1350 L/s
壓縮率 N2 1.4×108 min
He 1×104 min
H2 1×103 min
定額轉速 24600 rpm
啟動時間 11 分鐘
安裝方向 任意方向
泵入口的溫度 120℃ 以下
震動, measured by the Shimadzu method 小於0.01μm（單振幅）
推薦吹掃氣流量(Note 3) 20 至 30 mL/min
抽氣期間輔助真空泵的建議抽速 800 L/min 以上
工作環境溫度範圍 工作溫度：0℃至40℃/儲存溫度：-25℃至70℃
容許磁通密度 徑向 3 mT
軸向 15 mT
冷卻水 流量 2 to 4 L/min
壓力 0.2 to 0.5 Mpa
溫度 5 to 25 ℃
重量 59 kg
(Note1) 在入口法蘭處使用金屬墊片時。 如果使用O形圈墊圈，則極限壓力為10-7 pa。
(Note2) mL / min表示在0℃和1個大氣壓下的體積流量。（等效於SCCM。）
(Note3) 不使用防護網時。 如果使用防護網，則排氣速度（N2）如下：TMP-1303（0）：1130 L / s TMP-1503：1380 L / s; TMP-2203（0）：2050 L / s
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