大流量型 渦輪分子式幫浦【04 Series】

High pumping Throughput TURBO MOLECULAR PUMP【04 Series】
規格說明
TMP-2804LM TMP-3804LMC TMP-4304LMC

TURBO MOLECULAR PUMP TMP-2804LM(Note1)
Rotor coating None
Applicable power supply EI-R04M
Inlet flange VG250/ISO 250B
Outlet flange KF40
Cooling method Water cooled
Ultimate pressure(after baking)Pa (Torr) (Note2) 10-7 Pa order
Maxium flowrate of Ar gas (Note3) 1250 mL/min
Maximum inlet pressure during continuous operation(N2) 40 Pa
Maximum outlet pressure during continuous operation 270 Pa
Pumping speed (Note 4) N2 【VG250】2800 L/s 【ISO250B】2500 L/s
He 2800 L/s                      2600 L/s
   H2 2100 L/s                      2000 L/s
Compression ratio N2 1×109 min
                              He 1×105
                              H2 6×103
Rated rotation speed 27600 rpm
Startup time Within 12 minutes
Direction of installation Arbitrary
Baking temperature of pump inlet 120℃ or lower
Vibration, measured by the Shimadzu method Less than 0.01μm(single amplitude)
Recommended purge gas flowrate(Note 3) 30 mL/min
Recommended pumping speed of backing vacuum pump during gas purging 1500 L/min or higher
Operational ambient temperature range Operation:0℃ to 40℃ /Storage: -25℃ to 70℃
Allowable magnetic flux density Radial directions 3 mT
Axial directions 15 mT
Cooling water Flowrate 2 to 4 L/min
Pressure 0.2 to 0.5 Mpa
Temperature 5 to 25 ℃
Weight 105 kg
 
TURBO MOLECULAR PUMP TMP-3804LMC(Note1)
Rotor coating Coated
Applicable power supply EI-R04M
Inlet flange VG300/ISO 320B
Outlet flange KF40
Cooling method Water cooled
Ultimate pressure(after baking)Pa (Torr) (Note2) 10-7 Pa order
Maxium flowrate of Ar gas (Note3) 1900 mL/min
Maximum inlet pressure during continuous operation(N2) 40 Pa
Maximum outlet pressure during continuous operation 270 Pa
Pumping speed (Note 4) N2 3200 L/s
He 3100 L/s
   H2 2200 L/s
Compression ratio N2 【VG300】3800 L/s 【ISO320B】4000 L/s
He -                                       -
 H2 2500 L/s                              2500 L/s
Rated rotation speed 24000 rpm
Startup time Within 18 minutes
Direction of installation Arbitrary
Baking temperature of pump inlet 120℃ or lower
Vibration, measured by the Shimadzu method Less than 0.01μm(single amplitude)
Recommended purge gas flowrate(Note 3) 30 mL/min
Recommended pumping speed of backing vacuum pump during gas purging 1500 L/min or higher
Operational ambient temperature range Operation:0℃ to 40℃ /Storage: -25℃ to 70℃
Allowable magnetic flux density Radial directions 3 mT
Axial directions 15 mT
Cooling water Flowrate 2 to 4 L/min
Pressure 0.2 to 0.5 Mpa
Temperature 5 to 25 ℃
Weight 105 kg
 
TURBO MOLECULAR PUMP TMP-4304LMC(Note1)
Rotor coating Coated
Applicable power supply EI-R04M
Inlet flange VG350
Outlet flange KF40
Cooling method Water cooled
Ultimate pressure(after baking)Pa (Torr) (Note2) 10-7 Pa order
Maxium flowrate of Ar gas (Note3) 1900 mL/min
Maximum inlet pressure during continuous operation(N2) 40 Pa
Maximum outlet pressure during continuous operation 270 Pa
Pumping speed (Note 4) N2 4400 L/s
He -
   H2 2600 L/s
Compression ratio N2 1×109 min
He 1×105 min
 H2 6×103 min
Rated rotation speed 24000 rpm
Startup time Within 18 minutes
Direction of installation Arbitrary
Baking temperature of pump inlet 120℃ or lower
Vibration, measured by the Shimadzu method Less than 0.01μm(single amplitude)
Recommended purge gas flowrate(Note 3) 30 mL/min
Recommended pumping speed of backing vacuum pump during gas purging 1500 L/min or higher
Operational ambient temperature range Operation:0℃ to 40℃ /Storage: -25℃ to 70℃
Allowable magnetic flux density Radial directions 3 mT
Axial directions 15 mT
Cooling water Flowrate 2 to 4 L/min
Pressure 0.2 to 0.5 Mpa
Temperature 5 to 25 ℃
Weight 105 kg
 
(Note1) Models equipped with rotor overheating detection function are optionally available.(TMP-xxxS model)
(Note2)When an O-ring gasket is used at the inlet flange.
(Note3) mL/min shows the volumetric flowrate at 0℃ and 1 atmosphere.(Equivalent to SCCM.)
(Note4) When no protective net is used. If a protective net is used, the exhuast speed(N2) will be as follows:
TMP-2804(VG250):2250 L/s: TMP-2804(ISO 250B):2300 L/s ;TMP-3304:2900 L/s ;TMP-3804(VG300):3450 L/s ;TMP-3804(ISO320B):3600 L/s ;TMP-4304:4000 L/s



TMP-2804LM TMP-3804LMC TMP-4304LMC

TURBO MOLECULAR PUMP TMP-2804LM(Note1)
Rotor coating None
Applicable power supply EI-R04M
Inlet flange VG250/ISO 250B
Outlet flange KF40
Cooling method Water cooled
Ultimate pressure(after baking)Pa (Torr) (Note2) 10-7 Pa order
Maxium flowrate of Ar gas (Note3) 1250 mL/min
Maximum inlet pressure during continuous operation(N2) 40 Pa
Maximum outlet pressure during continuous operation 270 Pa
Pumping speed (Note 4) N2 【VG250】2800 L/s 【ISO250B】2500 L/s
He 2800 L/s 2600 L/s
H2 2100 L/s 2000 L/s
Compression ratio N2 1×109 min
He 1×105
H2 6×103
Rated rotation speed 27600 rpm
Startup time Within 12 minutes
Direction of installation Arbitrary
Baking temperature of pump inlet 120℃ or lower
Vibration, measured by the Shimadzu method Less than 0.01μm(single amplitude)
Recommended purge gas flowrate(Note 3) 30 mL/min
Recommended pumping speed of backing vacuum pump during gas purging 1500 L/min or higher
Operational ambient temperature range Operation:0℃ to 40℃ /Storage: -25℃ to 70℃
Allowable magnetic flux density Radial directions 3 mT
Axial directions 15 mT
Cooling water Flowrate 2 to 4 L/min
Pressure 0.2 to 0.5 Mpa
Temperature 5 to 25 ℃
Weight 105 kg
型號 TMP-2804LM(Note1)
轉子塗層 None
適用電源 EI-R04M
進氣法蘭 VG250/ISO 250B
出口法蘭 KF40
冷卻方式 水冷
極限壓力(after baking)Pa (Torr) (Note2) 10-7 Pa order
氬氣最大流量 (Note3) 1250 mL/min
連續運行時的最大入口壓力(N2) 40 Pa
連續運行時的最大出口壓力 270 Pa
抽速(Note 4) N2 【VG250】2800 L/s 【ISO250B】2500 L/s
He 2800 L/s 2600 L/s
H2 2100 L/s 2000 L/s
壓縮率 N2 1×109 min
He 1×105
H2 6×103
額定轉速 27600 rpm
啟動時間 12 分鐘
安裝方向 任意方向
泵入口的溫度 120℃以下
振動, measured by the Shimadzu method 小於0.01μm(單振幅)
建議吹掃氣流量(Note 3) 30 mL/min
抽氣期間輔助真空泵的建議抽速 1500 L / min或更高
工作環境溫度範圍 工作溫度:0℃至40℃/儲存溫度:-25℃至70℃
容許磁通密度 徑向 3 mT
軸向 15 mT
冷卻水 流量 2 to 4 L/min
壓力 0.2 to 0.5 Mpa
溫度 5 to 25 ℃
重量 105 kg
TURBO MOLECULAR PUMP TMP-3804LMC(Note1)
Rotor coating Coated
Applicable power supply EI-R04M
Inlet flange VG300/ISO 320B
Outlet flange KF40
Cooling method Water cooled
Ultimate pressure(after baking)Pa (Torr) (Note2) 10-7 Pa order
Maxium flowrate of Ar gas (Note3) 1900 mL/min
Maximum inlet pressure during continuous operation(N2) 40 Pa
Maximum outlet pressure during continuous operation 270 Pa
Pumping speed (Note 4) N2 3200 L/s
He 3100 L/s
H2 2200 L/s
Compression ratio N2 【VG300】3800 L/s 【ISO320B】4000 L/s
He - -
H2 2500 L/s 2500 L/s
Rated rotation speed 24000 rpm
Startup time Within 18 minutes
Direction of installation Arbitrary
Baking temperature of pump inlet 120℃ or lower
Vibration, measured by the Shimadzu method Less than 0.01μm(single amplitude)
Recommended purge gas flowrate(Note 3) 30 mL/min
Recommended pumping speed of backing vacuum pump during gas purging 1500 L/min or higher
Operational ambient temperature range Operation:0℃ to 40℃ /Storage: -25℃ to 70℃
Allowable magnetic flux density Radial directions 3 mT
Axial directions 15 mT
Cooling water Flowrate 2 to 4 L/min
Pressure 0.2 to 0.5 Mpa
Temperature 5 to 25 ℃
Weight 105 kg
型號 TMP-3804LMC(Note1)
轉子塗層 Coated
適用電源 EI-R04M
進氣法蘭 VG300/ISO 320B
出口法蘭 KF40
冷卻方式 水冷
極限壓力(after baking)Pa (Torr) (Note2) 10-7 Pa order
氬氣最大流量 (Note3) 1900 mL/min
連續運行時的最大入口壓力(N2) 40 Pa
連續運行時的最大出口壓力 270 Pa
抽速(Note 4) N2 3200 L/s
He 3100 L/s
H2 2200 L/s
壓縮率 N2 【VG300】3800 L/s 【ISO320B】4000 L/s
He - -
H2 2500 L/s 2500 L/s
額定轉速 24000 rpm
啟動時間 18 分鐘
安裝方向 任意方向
泵入口的溫度 120℃以下
振動, measured by the Shimadzu method 小於0.01μm(單振幅)
建議吹掃氣流量(Note 3) 30 mL/min
抽氣期間輔助真空泵的建議抽速 1500 L/min或更高
工作環境溫度範圍 工作溫度:0℃至40℃/儲存溫度:-25℃至70℃
容許磁通密度 徑向 3 mT
軸向 15 mT
冷卻水 流量 2 to 4 L/min
壓力 0.2 to 0.5 Mpa
溫度 5 to 25 ℃
重量 105 kg
TURBO MOLECULAR PUMP TMP-4304LMC(Note1)
Rotor coating Coated
Applicable power supply EI-R04M
Inlet flange VG350
Outlet flange KF40
Cooling method Water cooled
Ultimate pressure(after baking)Pa (Torr) (Note2) 10-7 Pa order
Maxium flowrate of Ar gas (Note3) 1900 mL/min
Maximum inlet pressure during continuous operation(N2) 40 Pa
Maximum outlet pressure during continuous operation 270 Pa
Pumping speed (Note 4) N2 4400 L/s
He -
H2 2600 L/s
Compression ratio N2 1×109 min
He 1×105 min
H2 6×103 min
Rated rotation speed 24000 rpm
Startup time Within 18 minutes
Direction of installation Arbitrary
Baking temperature of pump inlet 120℃ or lower
Vibration, measured by the Shimadzu method Less than 0.01μm(single amplitude)
Recommended purge gas flowrate(Note 3) 30 mL/min
Recommended pumping speed of backing vacuum pump during gas purging 1500 L/min or higher
Operational ambient temperature range Operation:0℃ to 40℃ /Storage: -25℃ to 70℃
Allowable magnetic flux density Radial directions 3 mT
Axial directions 15 mT
Cooling water Flowrate 2 to 4 L/min
Pressure 0.2 to 0.5 Mpa
Temperature 5 to 25 ℃
Weight 105 kg
型號 TMP-4304LMC(Note1)
轉子塗層 Coated
適用電源 EI-R04M
進氣法蘭 VG350
出口法蘭 KF40
冷卻方式 Water cooled
極限壓力(after baking)Pa (Torr) (Note2) 10-7 Pa order
氬氣最大流量 (Note3) 1900 mL/min
連續運行時的最大入口壓力(N2) 40 Pa
連續運行時的最大出口壓力 270 Pa
抽速 (Note 4) N2 4400 L/s
He -
H2 2600 L/s
壓縮率 N2 1×109 min
He 1×105 min
H2 6×103 min
額定轉速 24000 rpm
啟動時間 18 分鐘
安裝方向 任意方向
泵入口的溫度 120℃以下
振動, measured by the Shimadzu method 小於0.01μm(單振幅)
建議吹掃氣流量(Note 3) 30 mL/min
抽氣期間輔助真空泵的建議抽速 1500 L/min或更高
工作環境溫度範圍 工作溫度:0℃至40℃/儲存溫度:-25℃至70℃
容許磁通密度 徑向 3 mT
軸向 15 mT
冷卻水 流量 2 to 4 L/min
壓力 0.2 to 0.5 Mpa
溫度 5 to 25 ℃
重量 105 kg
(Note1) 可選配配備有轉子過熱檢測功能的型號。(TMP-xxxS model)
(Note2) 在入口法蘭上使用O形圈墊圈時。
(Note3) mL / min表示在0℃和1個大氣壓下的體積流量。(等效於SCCM。)
(Note4) 不使用防護網時。 如果使用防護網,則排放速度(N2)如下:
TMP-2804(VG250):2250 L / s:TMP-2804(ISO 250B):2300 L / s; TMP-3304:2900 L / s; TMP-3804(VG300):3450 L / s; TMP-3804( ISO320B):3600 L / s; TMP-4304:4000 L / s