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Wide-Range TURBO MOLECULAR PUMP【03 Series】
規格說明 :
| TURBO MOLECULAR PUMP |
TMP-203LM |
| Rotor coating |
None |
| Applicable power supply |
EI-R04M |
| Inlet flange |
VG100/ICF152/ISO 100B/ISO 100C |
| Outlet flange |
KF25 |
| Cooling method |
Water cooled |
| Ultimate pressure(after baking)Pa (Torr) (Note2) |
10-8 Pa order |
| Maximum inlet pressure during continuous operation(N2) |
200 Pa |
| Maximum outlet pressure during continuous operation |
400 Pa |
| Pumping speed (Note 4) |
N2 |
190 L/s |
|
He |
140 L/s |
| |
H2 |
120 L/s |
| Compression ratio |
N2 |
1×109 |
| |
He |
6×104 |
| |
H2 |
4×103 |
| Rated rotation speed |
50000 rpm |
| Startup time |
Within 5 minutes |
| Direction of installation |
Arbitrary |
| Baking temperature of pump inlet |
120℃ or lower |
| Vibration, measured by the Shimadzu method |
Less than 0.01μm(single amplitude) |
| Recommended purge gas flowrate(Note 3) |
20 to 30 mL/min |
| Recommended pumping speed of backing vacuum pump during gas purging |
200 L/min or higher |
| Operational ambient temperature range |
Operation：0℃ to 40℃ /Storage： -25℃ to 70℃ |
| Allowable magnetic flux density |
Radial directions |
3 mT |
| Axial directions |
15 mT |
| Cooling water |
Flowrate |
1 to 3 L/min |
| Pressure |
0.2 to 0.5 Mpa |
| Temperature |
5 to 30 ℃ |
| Weight |
9 kg |
|
 |
| TURBO MOLECULAR PUMP |
TMP-303LM |
| Rotor coating |
None |
| Applicable power supply |
EI-R04M |
| Inlet flange |
VG100/ICF152/ISO 100B/ISO 100C |
| Outlet flange |
KF25 |
| Cooling method |
Water cooled |
| Ultimate pressure(after baking)Pa (Torr) (Note2) |
10-8 Pa order |
| Maximum inlet pressure during continuous operation(N2) |
200Pa |
| Maximum outlet pressure during continuous operation |
400 Pa |
| Pumping speed (Note 4) |
N2 |
320 L/s |
|
He |
340 L/s |
| |
H2 |
320 L/s |
| Compression ratio |
N2 |
1×109 |
|
He |
8×104 |
|
H2 |
1×104 |
| Rated rotation speed |
45000 rpm |
| Startup time |
Within 5 minutes |
| Direction of installation |
Arbitrary |
| Baking temperature of pump inlet |
120℃ or lower |
| Vibration, measured by the Shimadzu method |
Less than 0.012μm(single amplitude) |
| Recommended purge gas flowrate(Note 3) |
20 to 30 mL/min |
| Recommended pumping speed of backing vacuum pump during gas purging |
200 L/min or higher |
| Operational ambient temperature range |
Operation：0℃ to 40℃ /Storage： -25℃ to 70℃ |
| Allowable magnetic flux density |
Radial directions |
3 mT |
| Axial directions |
15 mT |
| Cooling water |
Flowrate |
1 to 3 L/min |
| Pressure |
0.2 to 0.5 Mpa |
| Temperature |
5 to 30 ℃ |
| Weight |
14 kg |
|
| |
| TURBO MOLECULAR PUMP |
TMP-403LM |
| Rotor coating |
None |
| Applicable power supply |
EI-R04M |
| Inlet flange |
VG150/ICF203/ISO 160B/ISO 160C |
| Outlet flange |
KF25 |
| Cooling method |
Water cooled |
| Ultimate pressure(after baking)Pa (Torr) (Note2) |
10-8 Pa order |
| Maximum inlet pressure during continuous operation(N2) |
200 Pa |
| Maximum outlet pressure during continuous operation |
400 Pa |
| Pumping speed (Note 4) |
N2 |
420 L/s |
|
He |
360 L/s |
| |
H2 |
340 L/s |
| Compression ratio |
N2 |
1×109 |
|
He |
8×104 |
|
H2 |
1×104 |
| Rated rotation speed |
45000 rpm |
| Startup time |
Within 5 minutes |
| Direction of installation |
Arbitrary |
| Baking temperature of pump inlet |
120℃ or lower |
| Vibration, measured by the Shimadzu method |
Less than 0.012μm(single amplitude) |
| Recommended purge gas flowrate(Note 3) |
20 to 30 mL/min |
| Recommended pumping speed of backing vacuum pump during gas purging |
200 L/min or higher |
| Operational ambient temperature range |
Operation：0℃ to 40℃ /Storage： -25℃ to 70℃ |
| Allowable magnetic flux density |
Radial directions |
3 mT |
| Axial directions |
15 mT |
| Cooling water |
Flowrate |
1 to 3 L/min |
| Pressure |
0.2 to 0.5 Mpa |
| Temperature |
5 to 30 ℃ |
| Weight |
14 kg |
|
| |
| TURBO MOLECULAR PUMP |
TMP-803LM(0) |
| Rotor coating |
None |
| Applicable power supply |
EI-R04M |
| Inlet flange |
VG150/ICF203/ISO 160B |
| Outlet flange |
KF40 |
| Cooling method |
Water cooled |
| Ultimate pressure(after baking)Pa (Torr) (Note2) |
10-9 Pa order |
| Maximum inlet pressure during continuous operation(N2) |
400 Pa |
| Maximum outlet pressure during continuous operation |
655 Pa |
| Pumping speed (Note 4) |
N2 |
800 L/s |
|
He |
800 L/s |
| |
H2 |
700 L/s |
| Compression ratio |
N2 |
1×109 min |
|
He |
8×104 |
|
H2 |
4×103 |
| Rated rotation speed |
35000 rpm |
| Startup time |
Within 5 minutes |
| Direction of installation |
Arbitrary |
| Baking temperature of pump inlet |
120℃ or lower |
| Vibration, measured by the Shimadzu method |
Less than 0.01μm(single amplitude) |
| Recommended purge gas flowrate(Note 3) |
20 to 30 mL/min |
| Recommended pumping speed of backing vacuum pump during gas purging |
500 L/min or higher |
| Operational ambient temperature range |
Operation：0℃ to 40℃ /Storage： -25℃ to 70℃ |
| Allowable magnetic flux density |
Radial directions |
3 mT |
| Axial directions |
15 mT |
| Cooling water |
Flowrate |
1 to 3 L/min |
| Pressure |
0.2 to 0.5 Mpa |
| Temperature |
5 to 30 ℃ |
| Weight |
33 kg |
|
| |
| TURBO MOLECULAR PUMP |
TMP-1003LM |
| Rotor coating |
None |
| Applicable power supply |
EI-R04M |
| Inlet flange |
VG200/ICF253/ISO 200B |
| Outlet flange |
KF40 |
| Cooling method |
Water cooled |
| Ultimate pressure(after baking)Pa (Torr) (Note2) |
10-9 Pa order |
| Maximum inlet pressure during continuous operation(N2) |
400 Pa |
| Maximum outlet pressure during continuous operation |
655 Pa |
| Pumping speed (Note 4) |
N2 |
1080 L/s |
|
He |
930 L/s |
| |
H2 |
790 L/s |
| Compression ratio |
N2 |
1×109 min |
|
He |
8×104 |
|
H2 |
4×103 |
| Rated rotation speed |
35000 rpm |
| Startup time |
Within 5 minutes |
| Direction of installation |
Arbitrary |
| Baking temperature of pump inlet |
120℃ or lower |
| Vibration, measured by the Shimadzu method |
Less than 0.01μm(single amplitude) |
| Recommended purge gas flowrate(Note 3) |
20 to 30 mL/min |
| Recommended pumping speed of backing vacuum pump during gas purging |
500 L/min or higher |
| Operational ambient temperature range |
Operation：0℃ to 40℃ /Storage： -25℃ to 70℃ |
| Allowable magnetic flux density |
Radial directions |
3 mT |
| Axial directions |
15 mT |
| Cooling water |
Flowrate |
1 to 3 L/min |
| Pressure |
0.2 to 0.5 Mpa |
| Temperature |
5 to 30 ℃ |
| Weight |
32 kg max |
|
| |
| (Note1) When a metal gasket is used at the inlet flange. If an O-ring gasket is used, the ultimate pressure will be order of 10-7 pa. |
| (Note2) When no protective net is used. If a protective net is used, the exhuast speed(N2) will be as follows：TMP-203：180 L/s TMP-303：300 L/s ；TMP-403：400 L/s；TMP-803(0)：730 L/s；TMP-1003：970 L/s. |
| (Note3) mL/min shows the volumetric flowrate at 0℃ and 1 atmosphere.(Equivalent to SCCM.) |
| |
| TURBO MOLECULAR PUMP |
TMP-203LM |
| Rotor coating |
None |
| Applicable power supply |
EI-R04M |
| Inlet flange |
VG100/ICF152/ISO 100B/ISO 100C |
| Outlet flange |
KF25 |
| Cooling method |
Water cooled |
| Ultimate pressure(after baking)Pa (Torr) (Note2) |
10-8 Pa order |
| Maximum inlet pressure during continuous operation(N2) |
200 Pa |
| Maximum outlet pressure during continuous operation |
400 Pa |
| Pumping speed (Note 4) |
N2 |
190 L/s |
|
He |
140 L/s |
|
H2 |
120 L/s |
| Compression ratio |
N2 |
1×109 |
|
He |
6×104 |
|
H2 |
4×103 |
| Rated rotation speed |
50000 rpm |
| Startup time |
Within 5 minutes |
| Direction of installation |
Arbitrary |
| Baking temperature of pump inlet |
120℃ or lower |
| Vibration, measured by the Shimadzu method |
Less than 0.01μm(single amplitude) |
| Recommended purge gas flowrate(Note 3) |
20 to 30 mL/min |
| Recommended pumping speed of backing vacuum pump during gas purging |
200 L/min or higher |
| Operational ambient temperature range |
Operation：0℃ to 40℃ /Storage： -25℃ to 70℃ |
| Allowable magnetic flux density |
Radial directions |
3 mT |
| Axial directions |
15 mT |
| Cooling water |
Flowrate |
1 to 3 L/min |
| Pressure |
0.2 to 0.5 Mpa |
| Temperature |
5 to 30 ℃ |
| Weight |
9 kg |
| 型號 |
TMP-203LM |
| 轉子塗層 |
None |
| 適用電源 |
EI-R04M |
| 進氣法蘭 |
VG100/ICF152/ISO 100B/ISO 100C |
| 出口法蘭 |
KF25 |
| 冷卻方式 |
水冷 |
| 極限壓力(after baking)Pa (Torr) (Note2) |
10-8 Pa order |
| 連續運行時的最大入口壓力(N2) |
200 Pa |
| 連續運行時的最大出口壓力 |
400 Pa |
| 抽速(Note 4) |
N2 |
190 L/s |
|
He |
140 L/s |
|
H2 |
120 L/s |
| 壓縮率 |
N2 |
1×109 |
|
He |
6×104 |
|
H2 |
4×103 |
| 額定轉速 |
50000 rpm |
| 啟動時間 |
5 分鐘 |
| 安裝方向 |
任意方向 |
| 泵入口溫度 |
120℃以下 |
| 震動, measured by the Shimadzu method |
小於0.01μm（單振幅） |
| 建議吹掃氣體流量(Note 3) |
20 至 30 mL/min |
| 抽氣期間輔助真空泵的建議抽速 |
200 L / min以上 |
| 工作環境溫度範圍 |
工作溫度：0℃至40℃/儲存溫度：-25℃至70℃ |
| 容許磁通密度 |
徑向 |
3 mT |
| 軸向 |
15 mT |
| 冷卻水 |
流量 |
1 to 3 L/min |
| 壓力 |
0.2 to 0.5 Mpa |
| 溫度 |
5 to 30 ℃ |
| 重量 |
9 kg |
|
|
| TURBO MOLECULAR PUMP |
TMP-303LM |
| Rotor coating |
None |
| Applicable power supply |
EI-R04M |
| Inlet flange |
VG100/ICF152/ISO 100B/ISO 100C |
| Outlet flange |
KF25 |
| Cooling method |
Water cooled |
| Ultimate pressure(after baking)Pa (Torr) (Note2) |
10-8 Pa order |
| Maximum inlet pressure during continuous operation(N2) |
200Pa |
| Maximum outlet pressure during continuous operation |
400 Pa |
| Pumping speed (Note 4) |
N2 |
320 L/s |
|
He |
340 L/s |
|
H2 |
320 L/s |
| Compression ratio |
N2 |
1×109 |
|
He |
8×104 |
|
H2 |
1×104 |
| Rated rotation speed |
45000 rpm |
| Startup time |
Within 5 minutes |
| Direction of installation |
Arbitrary |
| Baking temperature of pump inlet |
120℃ or lower |
| Vibration, measured by the Shimadzu method |
Less than 0.012μm(single amplitude) |
| Recommended purge gas flowrate(Note 3) |
20 to 30 mL/min |
| Recommended pumping speed of backing vacuum pump during gas purging |
200 L/min or higher |
| Operational ambient temperature range |
Operation：0℃ to 40℃ /Storage： -25℃ to 70℃ |
| Allowable magnetic flux density |
Radial directions |
3 mT |
| Axial directions |
15 mT |
| Cooling water |
Flowrate |
1 to 3 L/min |
| Pressure |
0.2 to 0.5 Mpa |
| Temperature |
5 to 30 ℃ |
| Weight |
14 kg |
| 型號 |
TMP-303LM |
| 轉子塗層 |
None |
| 適用電源 |
EI-R04M |
| 進氣法蘭 |
VG100/ICF152/ISO 100B/ISO 100C |
| 出口法蘭 |
KF25 |
| 冷卻方式 |
水冷 |
| 極限壓力(after baking)Pa (Torr) (Note2) |
10-8 Pa order |
| 連續運行時的最大入口壓力(N2) |
200Pa |
| 連續運行時的最大出口壓力 |
400 Pa |
| 抽速 (Note 4) |
N2 |
320 L/s |
|
He |
340 L/s |
|
H2 |
320 L/s |
| 壓縮率 |
N2 |
1×109 |
|
He |
8×104 |
|
H2 |
1×104 |
| 額定轉速 |
45000 rpm |
| 啟動時間 |
5 分鐘 |
| 安裝方向 |
任意方向 |
| 泵入口溫度 |
120℃以下 |
| 震動, measured by the Shimadzu method |
小於0.012μm（單振幅） |
| 建議吹掃氣體流量(Note 3) |
20 至30 mL/min |
| 抽氣期間輔助真空泵的建議抽速 |
200 L / min以上 |
| 工作環境溫度範圍 |
工作溫度：0℃至40℃/儲存溫度：-25℃至70℃ |
| 容許磁通密度 |
徑向 |
3 mT |
| 軸向 |
15 mT |
| 冷卻水 |
流量 |
1 to 3 L/min |
| 壓力 |
0.2 to 0.5 Mpa |
| 溫度 |
5 to 30 ℃ |
| 重量 |
14 kg |
|
|
| TURBO MOLECULAR PUMP |
TMP-403LM |
| Rotor coating |
None |
| Applicable power supply |
EI-R04M |
| Inlet flange |
VG150/ICF203/ISO 160B/ISO 160C |
| Outlet flange |
KF25 |
| Cooling method |
Water cooled |
| Ultimate pressure(after baking)Pa (Torr) (Note2) |
10-8 Pa order |
| Maximum inlet pressure during continuous operation(N2) |
200 Pa |
| Maximum outlet pressure during continuous operation |
400 Pa |
| Pumping speed (Note 4) |
N2 |
420 L/s |
|
He |
360 L/s |
|
H2 |
340 L/s |
| Compression ratio |
N2 |
1×109 |
|
He |
8×104 |
|
H2 |
1×104 |
| Rated rotation speed |
45000 rpm |
| Startup time |
Within 5 minutes |
| Direction of installation |
Arbitrary |
| Baking temperature of pump inlet |
120℃ or lower |
| Vibration, measured by the Shimadzu method |
Less than 0.012μm(single amplitude) |
| Recommended purge gas flowrate(Note 3) |
20 to 30 mL/min |
| Recommended pumping speed of backing vacuum pump during gas purging |
200 L/min or higher |
| Operational ambient temperature range |
Operation：0℃ to 40℃ /Storage： -25℃ to 70℃ |
| Allowable magnetic flux density |
Radial directions |
3 mT |
| Axial directions |
15 mT |
| Cooling water |
Flowrate |
1 to 3 L/min |
| Pressure |
0.2 to 0.5 Mpa |
| Temperature |
5 to 30 ℃ |
| Weight |
14 kg |
| 型號 |
TMP-403LM |
| 轉子塗層 |
None |
| 適用電源 |
EI-R04M |
| 進氣法蘭 |
VG150/ICF203/ISO 160B/ISO 160C |
| 出口法蘭 |
KF25 |
| 冷卻方式 |
水冷 |
| 極限壓力(after baking)Pa (Torr) (Note2) |
10-8 Pa order |
| 連續運行時的最大入口壓力(N2) |
200 Pa |
| 連續運行時的最大出口壓力 |
400 Pa |
| 抽速 (Note 4) |
N2 |
420 L/s |
|
He |
360 L/s |
|
H2 |
340 L/s |
| 壓縮率 |
N2 |
1×109 |
|
He |
8×104 |
|
H2 |
1×104 |
| 定額轉速 |
45000 rpm |
| 啟動時間 |
5 分鐘 |
| 安裝方向 |
任意方向 |
| 泵入口溫度 |
120℃以下 |
| 震動, measured by the Shimadzu method |
小於0.012μm（單振幅） |
| 建議吹掃氣體流量(Note 3) |
20 至 30 mL/min |
20 至 30 mL/min
抽氣期間輔助真空泵的建議抽速 |
200 L/min 以上 |
| 工作環境溫度範圍 |
工作溫度：0℃至40℃/儲存溫度：-25℃至70℃ |
| 容許磁通密度 |
徑向 |
3 mT |
| 軸向 |
15 mT |
| 冷卻水 |
壓力 |
1 to 3 L/min |
| 流量 |
0.2 to 0.5 Mpa |
| 溫度 |
5 to 30 ℃ |
| 重量 |
14 kg |
|
|
| TURBO MOLECULAR PUMP |
TMP-803LM(0) |
| Rotor coating |
None |
| Applicable power supply |
EI-R04M |
| Inlet flange |
VG150/ICF203/ISO 160B |
| Outlet flange |
KF40 |
| Cooling method |
Water cooled |
| Ultimate pressure(after baking)Pa (Torr) (Note2) |
10-9 Pa order |
| Maximum inlet pressure during continuous operation(N2) |
400 Pa |
| Maximum outlet pressure during continuous operation |
655 Pa |
| Pumping speed (Note 4) |
N2 |
800 L/s |
|
He |
800 L/s |
|
H2 |
700 L/s |
| Compression ratio |
N2 |
1×109 min |
|
He |
8×104 |
|
H2 |
4×103 |
| Rated rotation speed |
35000 rpm |
| Startup time |
Within 5 minutes |
| Direction of installation |
Arbitrary |
| Baking temperature of pump inlet |
120℃ or lower |
| Vibration, measured by the Shimadzu method |
Less than 0.01μm(single amplitude) |
| Recommended purge gas flowrate(Note 3) |
20 to 30 mL/min |
| Recommended pumping speed of backing vacuum pump during gas purging |
500 L/min or higher |
| Operational ambient temperature range |
Operation：0℃ to 40℃ /Storage： -25℃ to 70℃ |
| Allowable magnetic flux density |
Radial directions |
3 mT |
| Axial directions |
15 mT |
| Cooling water |
Flowrate |
1 to 3 L/min |
| Pressure |
0.2 to 0.5 Mpa |
| Temperature |
5 to 30 ℃ |
| Weight |
33 kg |
| 型號 |
TMP-803LM(0) |
| 轉子塗層 |
None |
| 適用電源 |
EI-R04M |
| 進氣法蘭 |
VG150/ICF203/ISO 160B |
| 出口法蘭 |
KF40 |
| 冷卻方式 |
水冷 |
| 極限壓力(after baking)Pa (Torr) (Note2) |
10-9 Pa order |
| 連續運行時的最大入口壓力(N2) |
400 Pa |
| 連續運行時的最大出口壓力 |
655 Pa |
| 抽速 (Note 4) |
N2 |
800 L/s |
|
He |
800 L/s |
|
H2 |
700 L/s |
| 壓縮率 |
N2 |
1×109 min |
|
He |
8×104 |
|
H2 |
4×103 |
| 額定轉速 |
35000 rpm |
| 啟動時間 |
5 分鐘 |
| 安裝方向 |
任意方向 |
| 泵入口溫度 |
120℃以下 |
| 震動, measured by the Shimadzu method |
小於0.012μm（單振幅） |
| 建議吹掃氣體流量(Note 3) |
20 to 30 mL/min |
| 抽氣期間輔助真空泵的建議抽速 |
500 L/min 以上 |
| 工作環境溫度範圍 |
工作溫度：0℃至40℃/儲存溫度：-25℃至70℃ |
| 容許磁通密度 |
徑向 |
3 mT |
| 軸向 |
15 mT |
| 冷卻水 |
流量 |
1 to 3 L/min |
| 壓力 |
0.2 to 0.5 Mpa |
| 溫度 |
5 to 30 ℃ |
| 重量 |
33 kg |
|
|
| TURBO MOLECULAR PUMP |
TMP-1003LM |
| Rotor coating |
None |
| Applicable power supply |
EI-R04M |
| Inlet flange |
VG200/ICF253/ISO 200B |
| Outlet flange |
KF40 |
| Cooling method |
Water cooled |
| Ultimate pressure(after baking)Pa (Torr) (Note2) |
10-9 Pa order |
| Maximum inlet pressure during continuous operation(N2) |
400 Pa |
| Maximum outlet pressure during continuous operation |
655 Pa |
| Pumping speed (Note 4) |
N2 |
1080 L/s |
|
He |
930 L/s |
|
H2 |
790 L/s |
| Compression ratio |
N2 |
1×109 min |
|
He |
8×104 |
|
H2 |
4×103 |
| Rated rotation speed |
35000 rpm |
| Startup time |
Within 5 minutes |
| Direction of installation |
Arbitrary |
| Baking temperature of pump inlet |
120℃ or lower |
| Vibration, measured by the Shimadzu method |
Less than 0.01μm(single amplitude) |
| Recommended purge gas flowrate(Note 3) |
20 to 30 mL/min |
| Recommended pumping speed of backing vacuum pump during gas purging |
500 L/min or higher |
| Operational ambient temperature range |
Operation：0℃ to 40℃ /Storage： -25℃ to 70℃ |
| Allowable magnetic flux density |
Radial directions |
3 mT |
| Axial directions |
15 mT |
| Cooling water |
Flowrate |
1 to 3 L/min |
| Pressure |
0.2 to 0.5 Mpa |
| Temperature |
5 to 30 ℃ |
| Weight |
32 kg max |
| 型號 |
TMP-1003LM |
| 轉子塗層 |
None |
| 適用電源 |
EI-R04M |
| 進氣法蘭 |
VG200/ICF253/ISO 200B |
| 出口法蘭 |
KF40 |
| 冷卻方式 |
水冷 |
| 極限壓力(after baking)Pa (Torr) (Note2) |
10-9 Pa order |
| 連續運行時的最大入口壓力(N2) |
400 Pa |
| 連續運行時的最大出口壓力 |
655 Pa |
| 抽速 (Note 4) |
N2 |
1080 L/s |
|
He |
930 L/s |
|
H2 |
790 L/s |
| 壓縮率 |
N2 |
1×109 min |
|
He |
8×104 |
|
H2 |
4×103 |
| 額定轉速 |
35000 rpm |
| 啟動時間 |
5 分鐘 |
| 安裝方向 |
任意方向 |
| 泵入口溫度 |
120℃ 以下 |
| 震動, measured by the Shimadzu method |
小於 0.01μm(單震幅) |
| 建議吹掃氣體流量(Note 3) |
20 至 30 mL/min |
| 抽氣期間輔助真空泵的建議抽速 |
500 L/min 以上 |
| 工作環境溫度範圍 |
工作溫度：0℃至40℃/儲存溫度：-25℃至70℃ |
| 容許磁通密度 |
徑向 |
3 mT |
| 軸向 |
15 mT |
| 冷卻水 |
流量 |
1 to 3 L/min |
| 壓力 |
0.2 to 0.5 Mpa |
| 溫度 |
5 to 30 ℃ |
| 重量 |
32 kg max |
|
|
| (Note1) 在入口法蘭處使用金屬墊片時。 如果使用O形圈墊圈，則極限壓力為10-7 pa。 |
| (Note2) 不使用防護網時。 如果使用防護網，則排放速度（N2）為：TMP-203：180 L / s TMP-303：300 L / s； TMP-403：400 L / s； TMP-803（0） ：730 L / s； TMP-1003：970 L / s。 |
| (Note3) mL / min表示在0℃和1個大氣壓下的體積流量。（等效於SCCM。） |
|
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