Turbo Molecular Pump

 

Turbo molecular pump model		TMP-B70
Cooling method		Convection	Forced air by cooling fan	Water cooling
Ultimate pressure※2	After baking	※1	10-8 Pa order※2	10-8 Pa order※2
	Non-baking	10-6 Pa order	10-6 Pa order	10-6 Pa order
Pumping speed※3	N2	70 L/s	70 L/s	70 L/s
	He	60 L/s	60 L/s	60 L/s
	H2	49 L/s	49 L/s	49 L/s
Pumping speed（KF40）	N2	41 L/s	41 L/s	41 L/s
	He	46 L/s	46 L/s	46 L/s
	H2	42 L/s	42 L/s	42 L/s
Compression ratio	N2	> 1×109	> 1×109	> 1×109
	He	4×107	4×107	4×107
	H2	4×105	4×105	4×105
Critical backing pressure（N2 gas 87,000rpm）		1400Pa	1400Pa	1400Pa
Maximum allowable continuous backing pressure※4	N2	300 Pa（ambient <25℃） 200 Pa（ambient <30℃）	900 Pa（ambient <25℃） 600 Pa（ambient <35℃）	900 Pa（ambient <25℃） 600 Pa（ambient <40℃）
Maximum allowable gas throughput at continuous pumping		15 SCCM（ambient 25℃） 10 SCCM（ambient 30℃）	40 SCCM（ambient 25℃） 30 SCCM（ambient 35℃）	40 SCCM（ambient 25℃） 30 SCCM（ambient 45℃）
weight	ICF	5.0 kg	5.2 kg	5.1 kg
	VG	3.3 kg	3.5 kg	3.4 kg
	ISO	3.0 kg	3.2 kg	3.1 kg
	KF	3.1 kg	3.3 kg	3.2 kg
Bearing type		Passive magnetic bearing and ceramic bearing
Inlet flange		ICF114、VG65、ISO63K、KF40
Outlet port		KF16
Rated speed		87,000 rpm
Stat-up time（up to 80 %）		1.7 minutes
Mounting direction		In any desired direction
Noise [Shimadzu's method]※5		≤ 48 dB（A）
Admissible ambient magnetic field	Radial direction	3 mT
	Axial direction	15 mT
Input electric power	Voltage	DC24 V ± 5 %
	Maximum power	120 W

·         ※1: Only pumps equipped with a ICF flange and cooling fan can be baked.
·         ※2: When using a two-stage oil-sealed rotary pump as an auxiliary pump.
·         ※3: When no protective net is used. Pumping speed for N2 is 68 L/s when a protective net is used.
·         ※4: Maximum allowable backing pressure for continuous running when gas throughput at inlet port is 0 mL/min.
·         ※5: Measured for the ISO flange model.